Study of Thin Film Blue-Light MicroLEDs by Laser Lift-Off and Texture Process

Yu Hsuan Hsu; Tsung Chih Wan; Yu Yun Lo; Xin Dai Lin; Yi Hsin Lin; Hsiao Wen Zan; Ray Hua Horng

doi:10.1109/LED.2023.3338174

Study of Thin Film Blue-Light MicroLEDs by Laser Lift-Off and Texture Process

Yu Hsuan Hsu, Tsung Chih Wan, Yu Yun Lo, Xin Dai Lin, Yi Hsin Lin, Hsiao Wen Zan, Ray Hua Horng^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

In this study, thin-film blue-light micro-light-emitting diodes ( μ LEDs) were successfully fabricated by laser lift-off technique, which had an emission region of only 10μ m× 10μ m. Additionally, a texturing treatment was applied to the top undoped GaN surface. The texturing time was optimized to prevent a total reflective effect and further enhance the light extraction efficiency. As a result, the emission output power (@ 30 mA) and EQEmax of the μ LED textured for 2 minutes exhibited 1.35 times and 1.64 times higher values as compared with those of μ LED with a sapphire substrate, respectively.

Original language	English
Pages (from-to)	212-215
Number of pages	4
Journal	Ieee Electron Device Letters
Volume	45
Issue number	2
DOIs	https://doi.org/10.1109/LED.2023.3338174
State	Published - 1 Feb 2024

Keywords

GaN texture
Micro-LED
laser lift-off
light extraction

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10.1109/LED.2023.3338174

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title = "Study of Thin Film Blue-Light MicroLEDs by Laser Lift-Off and Texture Process",

abstract = "In this study, thin-film blue-light micro-light-emitting diodes ( μ LEDs) were successfully fabricated by laser lift-off technique, which had an emission region of only 10μ m× 10μ m. Additionally, a texturing treatment was applied to the top undoped GaN surface. The texturing time was optimized to prevent a total reflective effect and further enhance the light extraction efficiency. As a result, the emission output power (@ 30 mA) and EQEmax of the μ LED textured for 2 minutes exhibited 1.35 times and 1.64 times higher values as compared with those of μ LED with a sapphire substrate, respectively.",

keywords = "GaN texture, Micro-LED, laser lift-off, light extraction",

author = "Hsu, {Yu Hsuan} and Wan, {Tsung Chih} and Lo, {Yu Yun} and Lin, {Xin Dai} and Lin, {Yi Hsin} and Zan, {Hsiao Wen} and Horng, {Ray Hua}",

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doi = "10.1109/LED.2023.3338174",

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T1 - Study of Thin Film Blue-Light MicroLEDs by Laser Lift-Off and Texture Process

AU - Hsu, Yu Hsuan

AU - Wan, Tsung Chih

AU - Lo, Yu Yun

AU - Lin, Xin Dai

AU - Lin, Yi Hsin

AU - Zan, Hsiao Wen

AU - Horng, Ray Hua

PY - 2024/2/1

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N2 - In this study, thin-film blue-light micro-light-emitting diodes ( μ LEDs) were successfully fabricated by laser lift-off technique, which had an emission region of only 10μ m× 10μ m. Additionally, a texturing treatment was applied to the top undoped GaN surface. The texturing time was optimized to prevent a total reflective effect and further enhance the light extraction efficiency. As a result, the emission output power (@ 30 mA) and EQEmax of the μ LED textured for 2 minutes exhibited 1.35 times and 1.64 times higher values as compared with those of μ LED with a sapphire substrate, respectively.

AB - In this study, thin-film blue-light micro-light-emitting diodes ( μ LEDs) were successfully fabricated by laser lift-off technique, which had an emission region of only 10μ m× 10μ m. Additionally, a texturing treatment was applied to the top undoped GaN surface. The texturing time was optimized to prevent a total reflective effect and further enhance the light extraction efficiency. As a result, the emission output power (@ 30 mA) and EQEmax of the μ LED textured for 2 minutes exhibited 1.35 times and 1.64 times higher values as compared with those of μ LED with a sapphire substrate, respectively.

KW - GaN texture

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KW - laser lift-off

KW - light extraction

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Study of Thin Film Blue-Light MicroLEDs by Laser Lift-Off and Texture Process

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