Abstract
The micromachined tunable filter is studied and its potential applications to tunable laser are presented. The fabrication of a tunable Fabry-Perot filter based on the consideration of process and material compatibility is reported. A 1.55 μm laser diode is used as the light source for verifying the Fabry-Perot interferometer and the light output of the device is tuned by increasing bias voltages from 0 volts to 30 volts. The applications of tunable lasers exist in dense wavelength division multiplexing (DWDM) systems, optical networking and spectroscopy applications.