@inproceedings{217b374b889d4ccfa0a5acc44bc00167,
title = "Study of crystallinity in μc-Si:H films deposited by cat-CVD for thin film solar cell applications",
abstract = "The crystallinity of the hydrogenated microcrystalline silicon (μc-Si:H) film was known to influence the solar cell efficiency greatly. Also hydrogen was found to play a critical role in controlling the crystallinity. Instead of employing conventional plasma deposition techniques, this work focused on using catalytic chemical vapor deposition (Cat-CVD) to study the effect of hydrogen dilution and the filament-to-substrate distance on the crystallinity, deposition rate, microstructure factor and electrical property of the μc-Si:H film. We found that the substrate material and structure can affect the crystallinity of the μc-Si:H film and the incubation effect. Comparing bare glass, TCO-coated glass, a-Si:H-coated glass and μc-Si:H-coated glass, the microcrystalline phase grows the fastest onto μc-Si:H surface, but the slowest onto a-Si:H surface. Surprisingly, the template effect lasted for more than a thousand atomic layers of silicon.",
author = "Hsu, {C. H.} and Hsu, {Y. P.} and Yao, {F. H.} and Huang, {Y. T.} and Tsai, {C. C.} and Hsiao-Wen Zan and Bi, {C. C.} and Lu, {C. H.} and Yeh, {C. H.}",
year = "2010",
month = dec,
day = "24",
doi = "10.1557/PROC-1245-A21-05",
language = "English",
isbn = "9781605112220",
series = "Materials Research Society Symposium Proceedings",
pages = "465--470",
booktitle = "Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2010",
note = "2010 MRS Spring Meeting ; Conference date: 05-04-2010 Through 09-04-2010",
}