Structural and electrical characteristics of low-dielectric constant porous hydrogen silsesquioxane for Cu metallization

J. H. Wang, W. J. Chen, T. C. Chang, Po-Tsun Liu, S. L. Cheng, J. Y. Lin, L. J. Chen*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

The structural and electrical properties of porous hydrogen silsesquioxane (XLK) have been characterized using a combination of Fourier transform infrared spectroscopy, transmission electron microscope, Auger electron spectroscopy, current-voltage analyzer, and capacitance-voltage analyzer. The pores, about 2 nm in size and of spherical shape, were distributed randomly and uniformly in the XLK film. The dielectric constant of XLK film was as low as 2.1 owing to the high porosity and uniformity of the film. A smooth amorphous-like layer including Cu-O-Si was found to form between Cu and the XLK film after annealing at 500°C for 30 min. The mixed layer led to the higher leakage current of the XLK film. Cu was found to diffuse into XLK film after annealing at 600°C for 30 min.

Original languageEnglish
Pages (from-to)F141-F146
Number of pages6
JournalJournal of the Electrochemical Society
Volume150
Issue number8
DOIs
StatePublished - Aug 2003

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