Structural analysis of TiO2 and TiO2-Ag thin films and their antibacterial behaviors

J. H. Hsieh*, R. B. Yu, Y. K. Chang, C. Li

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

11 Scopus citations


TiO2 (rutile and anatase) thin films was first prepared using reactive sputtering, in an Ar+O2 plasma. In the 2nd stage of the experiment, various amounts (3, 7, and 10 at. %) of Ag was doped into the rutile film in order to form TiO2-Ag thin films. These films were annealed for one hour in Ar atmosphere, at 300, 400, and 500 °C. The films' structures were then examined using X-ray diffractometry. FESEM (field-emission scaning electron microscopy) was used to investigate the surface emergence of Ag particles. As for the examination of optical band gaps and absorption of these films, UV-Vis-NIR photometer was used. The results show that, in as-deposited condition, the addition of Ag might disrupt the growth of crystalline structure and cause the formation of amorphous films. After annealing, it is found that the structure tends to become anatase phase which is a metastable phase between amorphous titanium oxide and rutile. More importantly, the absorption of the Ag-doped films would be enhanced in the visible-light range. Some of the enhancement is clearly due to plasmon resonance effect. The Ag-doped samples have shown some antibacterial effect in dark. When irradiated with light, the samples show a synergistic behavior combining the bactericidal effect of Ag ions and photocatalytic effect of TiO2.

Original languageEnglish
Article number12012
JournalJournal of Physics: Conference Series
Issue number1
StatePublished - 2012
Event4th International Symposium on Functional Materials, ISFM2011 - Sendai, Japan
Duration: 2 Aug 20116 Aug 2011


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