@inproceedings{dfa304d078cb47eabfb6bb1b871ad541,
title = "Stressor design for FinFETs with air-gap spacers",
abstract = "The impact of various stressor elements on the performance of n-channel FinFET is summarized. Experimental FinFETs with air-gap spacer shows 25% drive current improvement despite slightly larger series resistance. TCAD suggests that carbon incorporation into the fin is the most likely explanation for drive current increase.",
author = "Lu, {Darsen D.} and Sachid, {Angada B.} and Huang, {Yao Min} and Chen, {Yi Ju} and Chen, {Chun Chi} and Chen, {Min Cheng} and Chen-Ming Hu",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2017 ; Conference date: 24-04-2017 Through 27-04-2017",
year = "2017",
month = jun,
day = "7",
doi = "10.1109/VLSI-TSA.2017.7942485",
language = "English",
series = "2017 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2017 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2017",
address = "United States",
}