Standard 0.18um 1P6M CMOS IC foundry flow for accelerometer, analog readout circuit and wafer level capping package integration

C. J. Huang*, C. S. Chen, K. A. Wen, Y. T. Cheng, J. Y. Chen, C. S. Chang, W. C. Chou

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    4 Scopus citations

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    Engineering & Materials Science