Stability of High-k thin films in moisture ambience - The effect of dissolution gas from acryl apparatus

Sadahiro Akama*, Akira Kikuchi, Junichi Tonotani, Shun Ichiro Ohmi, Hiroshi Iwai

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

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Engineering & Materials Science