Spin-on ZnO thin film transistors with oxidation treatment

Chen-Shuo Huang; Yi Teh Chou; Po-Tsun Liu; Wan Fang Chung; Jui Chien Huang

Spin-on ZnO thin film transistors with oxidation treatment

Chen-Shuo Huang^*, Yi Teh Chou, Po-Tsun Liu, Wan Fang Chung, Jui Chien Huang

^*Corresponding author for this work

Department of Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The ZnO TFTs was fabricated by spin-on method and investigated by modulating deposition environments. It was discovered that the conductivity of ZnO TFTs can be obviously changed by modulating curing temperature and the performances can be improved by incorporating oxygen.

Original language	English
Title of host publication	IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007
Editors	CH Chen, YS Tsai
Publisher	SOCIETY INFORMATION DISPLAY TAIPEI CHAPTER
Pages	557-559
Number of pages	3
ISBN (Print)	978-957-28522-4-8
State	Published - Jul 2007
Event	7th International Display Manufacturing Conference (IDMC 07) - Taipei, Taiwan Duration: 3 Jul 2007 → 6 Jul 2007

Conference

Conference	7th International Display Manufacturing Conference (IDMC 07)
Country/Territory	Taiwan
City	Taipei
Period	3/07/07 → 6/07/07

Keywords

TRANSPARENT
DEPOSITION

Cite this

@inproceedings{12d93661a8714c129b286a07d2b8c203,

title = "Spin-on ZnO thin film transistors with oxidation treatment",

abstract = "The ZnO TFTs was fabricated by spin-on method and investigated by modulating deposition environments. It was discovered that the conductivity of ZnO TFTs can be obviously changed by modulating curing temperature and the performances can be improved by incorporating oxygen.",

keywords = "TRANSPARENT, DEPOSITION",

author = "Chen-Shuo Huang and Chou, {Yi Teh} and Po-Tsun Liu and Chung, {Wan Fang} and Huang, {Jui Chien}",

year = "2007",

month = jul,

language = "English",

isbn = "978-957-28522-4-8",

pages = "557--559",

editor = "CH Chen and YS Tsai",

booktitle = "IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007",

publisher = "SOCIETY INFORMATION DISPLAY TAIPEI CHAPTER",

note = "7th International Display Manufacturing Conference (IDMC 07) ; Conference date: 03-07-2007 Through 06-07-2007",

}

Huang, C-S, Chou, YT, Liu, P-T, Chung, WF & Huang, JC 2007, Spin-on ZnO thin film transistors with oxidation treatment. in CH Chen & YS Tsai (eds), IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007. SOCIETY INFORMATION DISPLAY TAIPEI CHAPTER, pp. 557-559, 7th International Display Manufacturing Conference (IDMC 07), Taipei, Taiwan, 3/07/07.

Spin-on ZnO thin film transistors with oxidation treatment. / Huang, Chen-Shuo; Chou, Yi Teh; Liu, Po-Tsun et al.
IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007. ed. / CH Chen; YS Tsai. SOCIETY INFORMATION DISPLAY TAIPEI CHAPTER, 2007. p. 557-559.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Spin-on ZnO thin film transistors with oxidation treatment

AU - Huang, Chen-Shuo

AU - Chou, Yi Teh

AU - Liu, Po-Tsun

AU - Chung, Wan Fang

AU - Huang, Jui Chien

PY - 2007/7

Y1 - 2007/7

N2 - The ZnO TFTs was fabricated by spin-on method and investigated by modulating deposition environments. It was discovered that the conductivity of ZnO TFTs can be obviously changed by modulating curing temperature and the performances can be improved by incorporating oxygen.

AB - The ZnO TFTs was fabricated by spin-on method and investigated by modulating deposition environments. It was discovered that the conductivity of ZnO TFTs can be obviously changed by modulating curing temperature and the performances can be improved by incorporating oxygen.

KW - TRANSPARENT

KW - DEPOSITION

M3 - Conference contribution

SN - 978-957-28522-4-8

SP - 557

EP - 559

BT - IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007

A2 - Chen, CH

A2 - Tsai, YS

PB - SOCIETY INFORMATION DISPLAY TAIPEI CHAPTER

T2 - 7th International Display Manufacturing Conference (IDMC 07)

Y2 - 3 July 2007 through 6 July 2007

ER -

Spin-on ZnO thin film transistors with oxidation treatment

Abstract

Conference

Keywords

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