TY - GEN
T1 - Sodium and potassium ion sensing properties of EIS and ISFET structures with fluorinated hafnium oxide sensing film
AU - Ho, Kuan I.
AU - Lu, Tseng Fu
AU - Chang, Chung Po
AU - Lai, Chao Sung
AU - Yang, Chia Ming
PY - 2009
Y1 - 2009
N2 - The potassium (K+) and sodium (Na+) ion-sensitive membranes treated by the carbon tetrafluoride (CF4) plasma by using plasma-enhanced chemical vapor deposition (PECVD) on the single HfO2 sensing films based on Electrolyte-Insulator-Semiconductor (EIS) and Ion Sensitive Filed-Effect Transistor (ISFET) were proposed in this work. With CF4 plasma treatment, the fluorinated-EIS exhibits higher pK-sensitivity and pNa-sensitivity, wide sensing concentration range of potassium and sodium ion and high linearity. Before plasma treatment, the same ion sensitivity with 7 mV/pX (X = Na or K) in the concentration between 1 mM and 10 mM of K+ and Na+ was observed. After plasma treatment, the sensitivity of K+ and Na+ were increasing with increasing plasma time. The optimal sensitivity of potassium ion (49.38 mV/pK) and sodium ion (50.47 mV/pNa) was obtained during 5 min plasma treatment in the concentration range between 0.1 mM to 100 mM. For the results of fluorinated-ISEFT, the obvious changes as a function of potassium and sodium ion concentration were observed during titration.
AB - The potassium (K+) and sodium (Na+) ion-sensitive membranes treated by the carbon tetrafluoride (CF4) plasma by using plasma-enhanced chemical vapor deposition (PECVD) on the single HfO2 sensing films based on Electrolyte-Insulator-Semiconductor (EIS) and Ion Sensitive Filed-Effect Transistor (ISFET) were proposed in this work. With CF4 plasma treatment, the fluorinated-EIS exhibits higher pK-sensitivity and pNa-sensitivity, wide sensing concentration range of potassium and sodium ion and high linearity. Before plasma treatment, the same ion sensitivity with 7 mV/pX (X = Na or K) in the concentration between 1 mM and 10 mM of K+ and Na+ was observed. After plasma treatment, the sensitivity of K+ and Na+ were increasing with increasing plasma time. The optimal sensitivity of potassium ion (49.38 mV/pK) and sodium ion (50.47 mV/pNa) was obtained during 5 min plasma treatment in the concentration range between 0.1 mM to 100 mM. For the results of fluorinated-ISEFT, the obvious changes as a function of potassium and sodium ion concentration were observed during titration.
UR - http://www.scopus.com/inward/record.url?scp=77951094876&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2009.5398575
DO - 10.1109/ICSENS.2009.5398575
M3 - Conference contribution
AN - SCOPUS:77951094876
SN - 9781424445486
T3 - Proceedings of IEEE Sensors
SP - 1128
EP - 1131
BT - IEEE Sensors 2009 Conference - SENSORS 2009
T2 - IEEE Sensors 2009 Conference - SENSORS 2009
Y2 - 25 October 2009 through 28 October 2009
ER -