SiON waveguide and polymer waveguide for optical interconnects of silicon photonics

C. C. Hsiao, H. H. Chang, H. C. Fu, W. C. Lee, S. C. Chen, C. C. Lin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Silicon photonics provide many advantages to telecom, datacom, and high performance computer systems such as increase transmission distance, high data bandwidth and reduce energy consumption. In this paper, we present SiON taper waveguide (SiON-WG) as a mode converter between silicon waveguide (Si-WG) and polymer waveguide (P-WG) to keep coupling efficiency of ± 3 µ m misalignment. The propagation loss of polymer waveguide is 0.72 dB/cm at 1310 nm using cut-back method on a straight waveguide. The process of polymer waveguide on silicon photonic (SiPh) chip and flip chip bonding of polymer waveguide chip to silicon photonic chip are developed. Bonding gap between SiON waveguide and polymer waveguide is improved to obtain high coupling efficiency.

Original languageEnglish
Title of host publicationInternational Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2020 and 22nd International Conference on Electronics Materials and Packaging, EMAP 2020 - Proceedings
PublisherIEEE Computer Society
Pages215-218
Number of pages4
ISBN (Electronic)9781728198514
DOIs
StatePublished - 21 Oct 2020
Event15th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2020 and 22nd International Conference on Electronics Materials and Packaging, EMAP 2020 - Taipei, Taiwan
Duration: 21 Oct 202023 Oct 2020

Publication series

NameProceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT
Volume2020-October
ISSN (Print)2150-5934
ISSN (Electronic)2150-5942

Conference

Conference15th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2020 and 22nd International Conference on Electronics Materials and Packaging, EMAP 2020
Country/TerritoryTaiwan
CityTaipei
Period21/10/2023/10/20

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