@inproceedings{9c3a52447918450994fe3b3394354a8a,
title = "Single Si3N4 layer on dual substrate for pH sensing micro sensor",
abstract = "In this study, a novel approach for realization of an inorganic ISFET/REFET system was presented. Single Si3N4 layer was used as the sensing membrane of EIS structure directly on n and p type substrate. The differential pH sensitivity of them is 25.1 mV/pH, and the linearity is higher than 99%. The drift effect for the single Si3N4 EIS structures could be minimized to around 1 mV/h by this differential arrangement. Besides, light and hysteresis effect for both conditions were investigated.",
author = "Wang, {S. C.} and Lai, {C. S.} and Lue, {C. E.} and Yang, {C. M.}",
year = "2009",
doi = "10.1109/SAS.2009.4801778",
language = "English",
isbn = "9781424427871",
series = "SAS 2009 - IEEE Sensors Applications Symposium Proceedings",
pages = "61--64",
booktitle = "SAS 2009 - IEEE Sensors Applications Symposium Proceedings",
note = "IEEE Sensors Applications Symposium, SAS 2009 ; Conference date: 17-02-2009 Through 19-02-2009",
}