Single Chip of Electrostatic Discharge Detector for IC Manufacturing Field Control

I. Hsuan Wu, Ming Dou Ker

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

To detect and alarm the electrostatic discharge (ESD) events during the IC manufacturing environments, an antenna-driven ESD-event detector has been designed and fabricated in a single chip. The practically measured results have shown that the high-frequency transient peak-to-peak voltage (Vpp) during the ESD event has a significant correlation with its ESD-stress voltage level. The proposed ESD-event detector includes a logarithmic amplifier, a comparator, and a time discriminator. The output of the logarithmic amplifier demodulating Vpp is compared to a reference voltage with the comparator. The time discriminator can identify the ESD pulse by its duration time afterward. The single chip of the ESD-event detector has been implemented in a 0.18-μm CMOS process with a total silicon area of only 693×563 μm2 while dissipating 4.3 mW under a 1.8-V power supply. The proposed ESD-event detector can efficiently provide real-time ESD monitoring in the IC and semiconductor manufacturing factories.

Original languageEnglish
Title of host publication2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665409216
DOIs
StatePublished - 2022
Event2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022 - Hsinchu, Taiwan
Duration: 18 Apr 202221 Apr 2022

Publication series

Name2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022 - Proceedings

Conference

Conference2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022
Country/TerritoryTaiwan
CityHsinchu
Period18/04/2221/04/22

Keywords

  • ESD
  • ESD detector
  • logarithmic amplifier

Fingerprint

Dive into the research topics of 'Single Chip of Electrostatic Discharge Detector for IC Manufacturing Field Control'. Together they form a unique fingerprint.

Cite this