@inproceedings{976fe5675d124fdd8f00a3202e85249a,
title = "Single Chip of Electrostatic Discharge Detector for IC Manufacturing Field Control",
abstract = "To detect and alarm the electrostatic discharge (ESD) events during the IC manufacturing environments, an antenna-driven ESD-event detector has been designed and fabricated in a single chip. The practically measured results have shown that the high-frequency transient peak-to-peak voltage (Vpp) during the ESD event has a significant correlation with its ESD-stress voltage level. The proposed ESD-event detector includes a logarithmic amplifier, a comparator, and a time discriminator. The output of the logarithmic amplifier demodulating Vpp is compared to a reference voltage with the comparator. The time discriminator can identify the ESD pulse by its duration time afterward. The single chip of the ESD-event detector has been implemented in a 0.18-μm CMOS process with a total silicon area of only 693×563 μm2 while dissipating 4.3 mW under a 1.8-V power supply. The proposed ESD-event detector can efficiently provide real-time ESD monitoring in the IC and semiconductor manufacturing factories. ",
keywords = "ESD, ESD detector, logarithmic amplifier",
author = "Wu, {I. Hsuan} and Ker, {Ming Dou}",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022 ; Conference date: 18-04-2022 Through 21-04-2022",
year = "2022",
doi = "10.1109/VLSI-DAT54769.2022.9768083",
language = "English",
series = "2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2022 - Proceedings",
address = "美國",
}