@inproceedings{f434fd491dda41c0adb6ac0bb29b3c5d,
title = "Simulations of electric field distributions by the susceptor-coupling effects for 2.45GHz microwave inside microwave chamber",
abstract = "Microwave annealing were able for the applications of dopant activation[1,2] and silicidation[3] of the nano-scaled transistors, However, during conventional fixed-frequency microwave heating, standing wave patterns are formed in the microwave processing chamber resulting in nodes and antinodes over the processing area. This non-uniform energy distribution in turn results in non-uniform heating, commonly observed in the kitchen microwave oven. Coupling effects to improve the uniformity and dopant activation efficiency by fixed-frequency microwave annealing process was investigated[4]. Through the aid of susceptors, the uniformity of Rs and dopant activation efficiency could be improved.",
author = "Hsueh, {Fu Kuo} and Chang, {Chih Chen} and Huang, {Kun Ping} and Lee, {Yao Jen} and Wu, {Wen Fa} and Tien-Sheng Chao",
year = "2015",
month = aug,
day = "25",
doi = "10.1109/IPFA.2015.7224422",
language = "English",
series = "Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "385--388",
booktitle = "Proceedings of the 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015",
address = "United States",
note = "22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015 ; Conference date: 29-06-2015 Through 02-07-2015",
}