Simulation and fabrication of silicon oxynitride array waveguide grating for optical communication

Keyphrases

• Silicon Oxynitride (SiON) 100%
• Waveguide 100%
• Optical Communications 100%
• Arrayed Waveguide Grating 100%
• Plasma-enhanced Chemical Vapor Deposition (PECVD) 50%
• Scanning Electron Microscopy 50%
• Evolutionary Analysis 50%
• Crystallized Structure 50%
• High Contrast 50%
• Optical Films 50%
• Channel Spacing 50%
• Microstructural Evolution 50%
• Silicon Atom 50%
• Coupling Loss 50%
• Coupled Propagation 50%

Material Science

• Silicon 100%
• Waveguide 100%
• Oxynitride 100%
• Scanning Electron Microscopy 25%
• Plasma-Enhanced Chemical Vapor Deposition 25%
• Microstructural Evolution 25%
• Optical Film 25%