Abstract
In this work, we explore device design for ultra-thinbody FeFET NVMs using a new simulation framework by combining TCAD and the ferroelectric minor loop calculation. Our study indicates that, with the fringing capacitance from the spacers, the FeFET exhibits a larger memory window (MW) than that of intrinsic FeFET. For a given MW, the FeFET with high-K spacers allows smaller writing pulse, which is beneficial to endurance and energy efficiency. The FeFET with high-K spacers also exhibits a lower depolarization field, which is crucial to retention.
| Original language | English |
|---|---|
| Title of host publication | 2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 78-79 |
| Number of pages | 2 |
| ISBN (Electronic) | 9781728142326 |
| DOIs | |
| State | Published - Aug 2020 |
| Event | 2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020 - Hsinchu, Taiwan Duration: 10 Aug 2020 → 13 Aug 2020 |
Publication series
| Name | 2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020 |
|---|
Conference
| Conference | 2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020 |
|---|---|
| Country/Territory | Taiwan |
| City | Hsinchu |
| Period | 10/08/20 → 13/08/20 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 7 Affordable and Clean Energy
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