Similarity Based ART 1 Model for Automatic Die Defect Detection and Classification

Keyphrases

• Defect Detection 100%
• Similarity-based 100%
• Defect Classification 100%
• Die Defect 100%
• Wafer 25%
• Classification System 25%
• Product Yield 25%
• Minimum number 25%
• High Classification Accuracy 25%
• Cost Reduction 25%
• Vision-based 25%
• Input Sequence 25%
• Input Pattern 25%
• Human Eye 25%
• Defect Image 25%
• Fuzziness 25%
• Binary Image 25%
• Automatic Defect Detection 25%
• Subtract 25%
• Human Vision 25%
• Scattering Noise 25%
• Yield Reduction 25%
• Semiconductor Fabrication Process 25%
• Product Cost 25%
• Noisy pixel 25%
• Difference Image 25%

Engineering

• Similarities 100%
• Defect Detection 100%
• Defect Classification 100%
• Test Image 60%
• Reference Image 40%
• Product Yield 20%
• Input Sequence 20%
• Classification Accuracy 20%
• Cost Reduction 20%
• Human Eye 20%
• Semiconductor Fabrication 20%
• Fuzziness 20%
• Defect Image 20%
• Binary Image 20%
• Input Pattern 20%
• Great Importance 20%
• Human Vision 20%
• Difference Image 20%