TY - JOUR
T1 - Silane removal at ambient temperature by using alumina-supported metal oxide adsorbents
AU - Hsu, Jung Nan
AU - Tsai, Chuen-Tinn
AU - Chiang, Cindy
AU - Li, Shou Nan
PY - 2007/2
Y1 - 2007/2
N2 - Copper, zinc, and cerium oxide adsorbents supported on alumina were used to remove silane gas (SiH 4). The adsorbents were prepared using a coprecipitation method and characterized by the inductively coupled plasma mass spectrometry, X-ray powder diffractometer, and Brunauer-Emmett-Teller method (BET). The si-lane removal efficiency and adsorption capacity of the adsorbents were investigated in this study. Test results showed that the adsorbents containing active species had a removal efficiency >99.9% for SiH4 before breakthrough. Adsorbents containing mixed oxides (CuO-CeO2/ Al2O3 and CuO-ZnO/Al2O3), which showed well-dispersed active species and high BET surface areas, had a greater adsorption capacity than the adsorbents containing single metal oxide. However, when the CuO-ZnO/ Al2O3 adsorbents contain >40 wt% of active metal oxides, the increase of active species lowered the BET surface area leading to a decrease of the adsorption capacity. Additionally, when the content of the active metal oxides was between 20% and 40%, the CuO-ZnO/Al2O3 adsorbents demonstrated higher adsorption capacity.
AB - Copper, zinc, and cerium oxide adsorbents supported on alumina were used to remove silane gas (SiH 4). The adsorbents were prepared using a coprecipitation method and characterized by the inductively coupled plasma mass spectrometry, X-ray powder diffractometer, and Brunauer-Emmett-Teller method (BET). The si-lane removal efficiency and adsorption capacity of the adsorbents were investigated in this study. Test results showed that the adsorbents containing active species had a removal efficiency >99.9% for SiH4 before breakthrough. Adsorbents containing mixed oxides (CuO-CeO2/ Al2O3 and CuO-ZnO/Al2O3), which showed well-dispersed active species and high BET surface areas, had a greater adsorption capacity than the adsorbents containing single metal oxide. However, when the CuO-ZnO/ Al2O3 adsorbents contain >40 wt% of active metal oxides, the increase of active species lowered the BET surface area leading to a decrease of the adsorption capacity. Additionally, when the content of the active metal oxides was between 20% and 40%, the CuO-ZnO/Al2O3 adsorbents demonstrated higher adsorption capacity.
UR - http://www.scopus.com/inward/record.url?scp=33947713462&partnerID=8YFLogxK
U2 - 10.1080/10473289.2007.10465309
DO - 10.1080/10473289.2007.10465309
M3 - Article
C2 - 17355081
AN - SCOPUS:33947713462
SN - 1096-2247
VL - 57
SP - 204
EP - 210
JO - Journal of the Air and Waste Management Association
JF - Journal of the Air and Waste Management Association
IS - 2
ER -