Significant improvement of GaN crystal quality with ex-situ sputtered AlN nucleation layers

Shuo Wei Chen, Young Yang, Wei Chih Wen, Heng Li, Tien-chang Lu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

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Keyphrases

Engineering

Material Science