Si Nanopillar/SiGe Composite Structure for Thermally Managed Nano-devices

Daisuke Ohori, Masayuki Murata, Atsushi Yamamoto, Kazuhiko Endo, Min Hui Chuang, Ming Yi Lee, Yi-Ming Li, Jenn-Hwan Tarng, Yao Jen Lee, Seiji Samukawa*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

We have demonstrated a thermally managed Si nanopillar/SiGe composite structure. Our fabricated defect-free Si nanopillar channel structure showed a 1/100 times lower thermal conductivity than Si bulk thanks to the control of the phonon transports. The results of thermal conductivity measurements clarified that the nanopillar structure could eliminate electron-phonon scattering. As such, this structure represents a promising solution for advanced CMOS technologies.

Original languageEnglish
Title of host publicationNANO 2021 - 21st IEEE International Conference on Nanotechnology, Proceedings
PublisherIEEE Computer Society
Pages199-202
Number of pages4
ISBN (Electronic)9781665441568
DOIs
StatePublished - 28 Jul 2021
Event21st IEEE International Conference on Nanotechnology, NANO 2021 - Virtual, Montreal, Canada
Duration: 28 Jul 202130 Jul 2021

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
Volume2021-July
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Conference

Conference21st IEEE International Conference on Nanotechnology, NANO 2021
Country/TerritoryCanada
CityVirtual, Montreal
Period28/07/2130/07/21

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