@inproceedings{57596e6a86d743c3af9e58891ca6059b,
title = "Shape effect on the reflectance of sub-wavelength structures on silicon nitride for solar cell application",
abstract = "We stdy the spectral reflectivity of conical-, cylindrical-and parabolic-shaped silicon nitride (Si3N4) sub-wavelength structures (SWS). A multilayer rigorous coupled-wave approach is adopted to estimate the reflection properties of Si3N4 SWS. Optimal shapes of SWS in terms of effective reflectance are analyzed over a range of wavelength. The results of our study show that a 3.15% effective reflectivity could be achieved for the optimized conical-shaped SWS with the height of 160 nm and the non-etched Si3N4 layer thickness of 70 nm among different shape structure.",
keywords = "Antireflection coating, Multilayer, Rigorous coupled-wave approach, Shape effect, Silicon nitride, Sub-wavelength structure",
author = "Sahoo, {Kartik Chandra} and Yiming Li and Chang, {Edward Y.}",
year = "2010",
month = jun,
language = "English",
isbn = "9781439834152",
series = "Nanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010",
pages = "737--740",
booktitle = "Nanotechnology 2010",
note = "Nanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 ; Conference date: 21-06-2010 Through 24-06-2010",
}