TY - GEN
T1 - Sensitivity improvements of HfxWyOz sensing membranes for pK sensors based on electrolyte-insulator-semiconductor structure
AU - Chung, Wen Yu
AU - Yang, Chia Ming
AU - Lu, Tseng Fu
AU - Lai, Chao Sung
PY - 2009
Y1 - 2009
N2 - In this study, the hydrogen ion and potassium ion sensing properties of mixing hafnium oxide-tungsten oxide (HfxWyOz) membranes on an electrolyte-insulator-semiconductor (EIS) structure by co-sputtering method were investigated. For tungsten oxide, the increasing of pH-sensitivity (35.47 mV/pH to 46.22 mV/pH), linearity (98.11% to 99.87%), measuring range (pH 6-pH 12 to pH 2-pH 12) and the decreasing of hysteresis (17.63 mV to 2.34 mV) were observed with increasing the ratio of hafnium oxide incorporation. For hafnium oxide, an increasing of pK-sensitivity (7.07 mV mV/ pK to 26.84 mV/ pK in the concentration range between 1 mM to 100 mM) was observed with increasing the ratio of tungsten oxide incorporation. For potassium ion detection, the HfxWyOz (HfO 2-60%) sensing membrane with good pK sensitivity (26.84 mV/pK) and high linearity (99.67%) in the concentration range between 1 mM and 100 mM and with good selectivity (low pH-sensitivity) over hydrogen ion was chosen as the optimal condition for pK sensor application.
AB - In this study, the hydrogen ion and potassium ion sensing properties of mixing hafnium oxide-tungsten oxide (HfxWyOz) membranes on an electrolyte-insulator-semiconductor (EIS) structure by co-sputtering method were investigated. For tungsten oxide, the increasing of pH-sensitivity (35.47 mV/pH to 46.22 mV/pH), linearity (98.11% to 99.87%), measuring range (pH 6-pH 12 to pH 2-pH 12) and the decreasing of hysteresis (17.63 mV to 2.34 mV) were observed with increasing the ratio of hafnium oxide incorporation. For hafnium oxide, an increasing of pK-sensitivity (7.07 mV mV/ pK to 26.84 mV/ pK in the concentration range between 1 mM to 100 mM) was observed with increasing the ratio of tungsten oxide incorporation. For potassium ion detection, the HfxWyOz (HfO 2-60%) sensing membrane with good pK sensitivity (26.84 mV/pK) and high linearity (99.67%) in the concentration range between 1 mM and 100 mM and with good selectivity (low pH-sensitivity) over hydrogen ion was chosen as the optimal condition for pK sensor application.
UR - http://www.scopus.com/inward/record.url?scp=77951137953&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2009.5398574
DO - 10.1109/ICSENS.2009.5398574
M3 - Conference contribution
AN - SCOPUS:77951137953
SN - 9781424445486
T3 - Proceedings of IEEE Sensors
SP - 1124
EP - 1127
BT - IEEE Sensors 2009 Conference - SENSORS 2009
T2 - IEEE Sensors 2009 Conference - SENSORS 2009
Y2 - 25 October 2009 through 28 October 2009
ER -