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Selectivity investigation of HfO2 to oxide using wet etching

  • Tsung Kuei Kang*
  • , Chih Cheng Wang
  • , Bing-Yue Tsui
  • , Yuan Hsin Li
    • *Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    4 Scopus citations

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