Selective local synthesis of nanowires on a microreactor chip

Wei Chih Lin*, Yao Joe Yang, Chien-Wen Hsieh, Ching Hsiang Tsai, Chien Chen Chen, Chao Chiun Liang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

21 Scopus citations


This work presents a novel synthesis process for selectively locally growing nanowires on a microreactor chip fabricated by MEMS processes. Nanowires are synthesized in a microchamber by patterned catalysts, reactive gases, and integrated microheaters heating the catalysts to the required temperatures for nanowires growth. Using a field emission scanning electron microscope (FE-SEM) and a transmission electron microscope (TEM), this paper confirms that the synthesized structures are multi-wall carbon nanotubes (CNT). The average diameter of the CNTs is about 16.93 nm and the length is about 100-200 nm. Applying this novel process, the location of the synthesized CNTs can be positioned onto the microheaters in a controllable way. Furthermore, by means of the developed microheater modeling, the chemical vapor deposition CNTs synthesis process can be conducted in low temperature and a low voltage as small as 7 V is required for the microheaters. The proposed synthesis approach makes it possible to integrate CNTs on IC devices by effectively diminishing thermal damage during their growing process.

Original languageEnglish
Pages (from-to)625-632
Number of pages8
JournalSensors and Actuators, A: Physical
Issue numberSPEC. ISS.
StatePublished - 14 Aug 2006


  • Carbon nanotubes (CNTs)
  • Microheater
  • Microreactor
  • Nanowires


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