Selective functionalization on ultra-thin body FETs

H. H. Liu; Y. S. Lin; C. C. Chen; Jeng-Tzong Sheu

doi:10.1109/NEMS.2011.6017524

Selective functionalization on ultra-thin body FETs

H. H. Liu, Y. S. Lin, C. C. Chen, Jeng-Tzong Sheu^*

^*Corresponding author for this work

Institute of Nonotechnology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A new method of selective functionalization of ultra-thin body field-effect transistors (UTBFETs) is reported for biosensor applications. A polymer film, Polymethylmethacrylate (PMMA), is used as blocking layer and is ablated electrically at the specific region on UTBFETs by localized joule heating. The exposed site was then functionalized with a chemical linker molecule, N-(2-Aminoethyl)- 3-aminopropyl-trimethoxysilane (AEAPTMS), while the surrounding area is still protected by the chemically inert polymer layer. As demonstration, both gold nanoparticles (AuNPs) and fluorescein isothiocyanate (FITC) molecules are selectively bound onto the linker molecules subsequently on the surface of exposed binding sites of UTBFETs.

Original language	English
Title of host publication	NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages	1000-1003
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2011.6017524
State	Published - 20 Feb 2011
Event	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan Duration: 20 Feb 2011 → 23 Feb 2011

Publication series

Name	NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Country/Territory	Taiwan
City	Kaohsiung
Period	20/02/11 → 23/02/11

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10.1109/NEMS.2011.6017524

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Liu, H. H., Lin, Y. S., Chen, C. C., & Sheu, J.-T. (2011). Selective functionalization on ultra-thin body FETs. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 1000-1003). Article 6017524 (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017524

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title = "Selective functionalization on ultra-thin body FETs",

abstract = "A new method of selective functionalization of ultra-thin body field-effect transistors (UTBFETs) is reported for biosensor applications. A polymer film, Polymethylmethacrylate (PMMA), is used as blocking layer and is ablated electrically at the specific region on UTBFETs by localized joule heating. The exposed site was then functionalized with a chemical linker molecule, N-(2-Aminoethyl)- 3-aminopropyl-trimethoxysilane (AEAPTMS), while the surrounding area is still protected by the chemically inert polymer layer. As demonstration, both gold nanoparticles (AuNPs) and fluorescein isothiocyanate (FITC) molecules are selectively bound onto the linker molecules subsequently on the surface of exposed binding sites of UTBFETs.",

author = "Liu, {H. H.} and Lin, {Y. S.} and Chen, {C. C.} and Jeng-Tzong Sheu",

year = "2011",

month = feb,

day = "20",

doi = "10.1109/NEMS.2011.6017524",

language = "English",

isbn = "9781612847757",

series = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

pages = "1000--1003",

booktitle = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

note = "6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 ; Conference date: 20-02-2011 Through 23-02-2011",

}

Liu, HH, Lin, YS, Chen, CC & Sheu, J-T 2011, Selective functionalization on ultra-thin body FETs. in NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems., 6017524, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp. 1000-1003, 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, 20/02/11. https://doi.org/10.1109/NEMS.2011.6017524

Selective functionalization on ultra-thin body FETs. / Liu, H. H.; Lin, Y. S.; Chen, C. C. et al.
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. 2011. p. 1000-1003 6017524 (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Lin, Y. S.

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N2 - A new method of selective functionalization of ultra-thin body field-effect transistors (UTBFETs) is reported for biosensor applications. A polymer film, Polymethylmethacrylate (PMMA), is used as blocking layer and is ablated electrically at the specific region on UTBFETs by localized joule heating. The exposed site was then functionalized with a chemical linker molecule, N-(2-Aminoethyl)- 3-aminopropyl-trimethoxysilane (AEAPTMS), while the surrounding area is still protected by the chemically inert polymer layer. As demonstration, both gold nanoparticles (AuNPs) and fluorescein isothiocyanate (FITC) molecules are selectively bound onto the linker molecules subsequently on the surface of exposed binding sites of UTBFETs.

AB - A new method of selective functionalization of ultra-thin body field-effect transistors (UTBFETs) is reported for biosensor applications. A polymer film, Polymethylmethacrylate (PMMA), is used as blocking layer and is ablated electrically at the specific region on UTBFETs by localized joule heating. The exposed site was then functionalized with a chemical linker molecule, N-(2-Aminoethyl)- 3-aminopropyl-trimethoxysilane (AEAPTMS), while the surrounding area is still protected by the chemically inert polymer layer. As demonstration, both gold nanoparticles (AuNPs) and fluorescein isothiocyanate (FITC) molecules are selectively bound onto the linker molecules subsequently on the surface of exposed binding sites of UTBFETs.

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Selective functionalization on ultra-thin body FETs

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