Selective Deposition of PdO Nanoparticles on Si Nanodevices for Hydrogen Sensing

Yu Sheng Lin, Cheng Yen Wu, Fu Ming Pan, Jeng Tzong Sheu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


In this paper, we present a method, involving plasma-enhanced atomic layer deposition and constant-power device-localized Joule heating (DLJH), for the selective deposition of palladium oxide (PdO) nanoparticles at the n- region of n+/n-/n+ polysilicon nanobelt (PNB) devices. These PdO-decorated PNB devices were then operated under DLJH so that the temperature of the n- region was maintained during the sensing of H2 gas. From their measured responses, the devices operated at a temperature of 339 K exhibited the most reactive interactions between PdO and H2. Considering the possibility of humidity interference, we also characterized the PdO-decorated PNB devices for H2 sensing at various relative humidities. The PdO nanoparticles on the PNB devices having a grain distance that sustained a spillover effect were almost immune to RH interference.

Original languageEnglish
Pages (from-to)10365-10374
Number of pages10
JournalACS Applied Nano Materials
Issue number12
StatePublished - 23 Jun 2023


  • device-localized Joule heating
  • hydrogen sensing
  • palladium oxide
  • plasma-enhanced atomic layer deposition
  • polysilicon nanobelt
  • relative humidity
  • selective deposition


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