Selective Deposition of Multiple Sensing Materials on Si Nanobelt Devices through Plasma-Enhanced Chemical Vapor Deposition and Device-Localized Joule Heating

Ru Zheng Lin, Kuang Yang Cheng, Fu-Ming Pan, Jeng-Tzong Sheu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

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Material Science

Chemical Engineering