Selective deposition of gold particles on dip-pen nanolithography patterns on silicon dioxide surfaces

Jeng-Tzong Sheu*, Chia Hao Wu, Tien-Sheng Chao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

We report a novel platform to perform selective deposition of gold nanoparticles on dip-pen nanolithographic patterns on SiO2 surfaces. An "inked" atomic force microscope (AFM) tip was adopted to deposit 2.2 mM organic N-(2-aminoethyl)-3-aminopropyltrimethoxysilane (AEAPTMS) molecules in nanopatterns through a water meniscus onto a SiO2 substrate under ambient conditions; the molecules act as linkers for the selective deposition of gold nanoparticles on the SiO2 surface. Conditions for dip-pen nanolithography of organic nanopatterns of AEAPTMS were investigated. In addition, gold nanoparticles with negatively-charged citrate surfaces were deposited selectively on top of the organic patterns. X-ray photoelectron spectroscopy was then used to evaluate the presence of gold nanoparticles on the SiO2 surface. Lateral force microscopy was utilized to differentiate the surface between oxidized semiconductors and patterned areas with monolayer of AEAPTMS. Linewidths down to 60nm have been successfully achieved by this method.

Original languageEnglish
Pages (from-to)3693-3697
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number4 B
DOIs
StatePublished - 25 Apr 2006

Keywords

  • AFM tip
  • Dip-pen nanolithography
  • Gold nanoparticles
  • Lateral force microscopy
  • N-(2-aminoethyl)-3- aminopropyltrimethoxysilane
  • X-ray photoelectron spectroscopy

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