Selective deposition of gold nanoparticles on SiO 2 /Si nanowire

Jeng-Tzong Sheu*, C. C. Chen, P. C. Huang, M. L. Hsu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

11 Scopus citations


We demonstrate selective deposition of citrate-passivated gold nanoparticles onto silicon dioxide patterns. Further, selective deposition of gold nanoparticles on the oxides, generated by scanning probe lithography (SPL), surface of silicon nanowire is achieved. Main methodology is to form H-terminated silicon surface and hydroxyl group on SiO 2 sample surface, then link amino function group only on SiO 2 surface by self-assembly mechanism. N-(2-Aminoethyl)-3-aminopropyl-trimethoxysilane (AEAPTMS) pretreated sample was immersed in the gold colloidal solution such that the NH 2 group become protonated forming NH 3+ . The NH 3+ groups provide a negative charge bindable environment for citrate-passivated gold nanoparticles. Impact on different AEAPTMS dilute solvents is also investigated for the performance of selective deposition of gold nanoparticles. It is found that H-terminated sample surface effectively eliminated nonspecific reaction during silanization such that microscale or nanoscale selective deposition of gold nanoparticles is obtainable. The proposed method can be applied in both nanoelectronics and nanobiosensors.

Original languageEnglish
Pages (from-to)294-299
Number of pages6
JournalMicroelectronic Engineering
Issue number1-4
StatePublished - 1 Mar 2005
EventProceedings of the 30th International Conference on Micro- and Nano-Engineering -
Duration: 19 Sep 200422 Sep 2004


  • Gold nanoparticles
  • Scanning probe lithography
  • Self-assembly


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