Schottky barrier free NiSi/Si junction technology by Yb-implantation for 1xnm CMOS applications

Szu Hung Chen, Min Cheng Chen, Hung Min Chen, Chuan Feng Shih, Shih Hsiung Wu, Yi Ying Ho, Yu Sheng Lai, Shou Ji Chen, Kent Liu, Bo Yuan Chen, Dong Yen Lai, Chang Hsien Lin, Chia Yi Lin, Fu Kuo Hsueh, Chi Ming Wu, Cho Lun Hsu, Wen Cheng Chiu, Chun Chi Chen, Andy Liu, Ching Tai HsuCheng San Wu, Mei Yi Lee, Tong Huan Chou, Jie Yi Yao, Yi Ling Shen, Qiong Zi Hsu, Kun Lin Lin, Chien Ting Wu, Mei Ling Kuo, Chi Hui Yang, Wen Fa Wu, Chiahua Ho, Chen-Ming Hu, Fu Liang Yang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science