Scaling variance, invariance and prediction of design rule: From 0.25-μm to 0.10-μtm nodes in the era of foundry manufacturing

K. Y.Y. Doong*, J. K. Ting, S. Hsieh, S. C. Lin, B. Shen, J. C. Guo, K. L. Young, I. C. Chen, J. Y.C. Sun, J. K. Wang

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

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Engineering & Materials Science