Scaling variance, invariance and prediction of design rule: From 0.25-μm to 0.10-μtm nodes in the era of foundry manufacturing
- K. Y.Y. Doong*
- , J. K. Ting
- , S. Hsieh
- , S. C. Lin
- , B. Shen
- , J. C. Guo
- , K. L. Young
- , I. C. Chen
- , J. Y.C. Sun
- , J. K. Wang
*Corresponding author for this work
Research output: Contribution to conference › Paper › peer-review
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