Scaling variance, invariance and prediction of design rule: From 0.25-μm to 0.10-μtm nodes in the era of foundry manufacturing

K. Y.Y. Doong; J. K. Ting; S. Hsieh; S. C. Lin; B. Shen; J. C. Guo; K. L. Young; I. C. Chen; J. Y.C. Sun; J. K. Wang

doi:10.1109/IWSTM.2001.933822

Scaling variance, invariance and prediction of design rule: From 0.25-μm to 0.10-μtm nodes in the era of foundry manufacturing

K. Y.Y. Doong^*, J. K. Ting, S. Hsieh, S. C. Lin, B. Shen, J. C. Guo, K. L. Young, I. C. Chen, J. Y.C. Sun, J. K. Wang

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

5 Scopus citations

Abstract

The design rules are categorized into two parts: the primitive and the affiliate ones, to excogitate the variance and invariance among the different technology nodes. The scaling trend was characterized and the process control capabilities of design rules were reviewed. Based on the data of in-line methodology and process physical specification, a novel algorithm is enacted to generate the design rule of next generation. The design rule is disassembled into two parts: ones are the criteria of electrical specification, and the others are the variations induced by the process sequences. The variations are modeled as the statistical distributions of in-line datum set. Monte Carlo simulation is used to extract the variations of multiple variable process parameters. Then, the design rules can be derived from the criteria of electrical specification, and the summation of the variations of multiple variable process parameters.

Original language	English
Pages	38-42
Number of pages	5
DOIs	https://doi.org/10.1109/IWSTM.2001.933822
State	Published - Jun 2001
Event	2001 6th International Workshop on Statistical Methodology - Kyoto, Japan Duration: 10 Jun 2001 → 10 Jun 2001

Conference

Conference	2001 6th International Workshop on Statistical Methodology
Country/Territory	Japan
City	Kyoto
Period	10/06/01 → 10/06/01

Keywords

Design rule
Electrical specifications
Inline metrology
Monte Carlo simulation
Physical specifications

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10.1109/IWSTM.2001.933822

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Doong, K. Y. Y., Ting, J. K., Hsieh, S., Lin, S. C., Shen, B., Guo, J. C., Young, K. L., Chen, I. C., Sun, J. Y. C., & Wang, J. K. (2001). Scaling variance, invariance and prediction of design rule: From 0.25-μm to 0.10-μtm nodes in the era of foundry manufacturing. 38-42. Paper presented at 2001 6th International Workshop on Statistical Methodology, Kyoto, Japan. https://doi.org/10.1109/IWSTM.2001.933822

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title = "Scaling variance, invariance and prediction of design rule: From 0.25-μm to 0.10-μtm nodes in the era of foundry manufacturing",

abstract = "The design rules are categorized into two parts: the primitive and the affiliate ones, to excogitate the variance and invariance among the different technology nodes. The scaling trend was characterized and the process control capabilities of design rules were reviewed. Based on the data of in-line methodology and process physical specification, a novel algorithm is enacted to generate the design rule of next generation. The design rule is disassembled into two parts: ones are the criteria of electrical specification, and the others are the variations induced by the process sequences. The variations are modeled as the statistical distributions of in-line datum set. Monte Carlo simulation is used to extract the variations of multiple variable process parameters. Then, the design rules can be derived from the criteria of electrical specification, and the summation of the variations of multiple variable process parameters.",

keywords = "Design rule, Electrical specifications, Inline metrology, Monte Carlo simulation, Physical specifications",

author = "Doong, {K. Y.Y.} and Ting, {J. K.} and S. Hsieh and Lin, {S. C.} and B. Shen and Guo, {J. C.} and Young, {K. L.} and Chen, {I. C.} and Sun, {J. Y.C.} and Wang, {J. K.}",

year = "2001",

month = jun,

doi = "10.1109/IWSTM.2001.933822",

language = "English",

pages = "38--42",

note = "2001 6th International Workshop on Statistical Methodology ; Conference date: 10-06-2001 Through 10-06-2001",

}

Doong, KYY, Ting, JK, Hsieh, S, Lin, SC, Shen, B, Guo, JC, Young, KL, Chen, IC, Sun, JYC & Wang, JK 2001, 'Scaling variance, invariance and prediction of design rule: From 0.25-μm to 0.10-μtm nodes in the era of foundry manufacturing', Paper presented at 2001 6th International Workshop on Statistical Methodology, Kyoto, Japan, 10/06/01 - 10/06/01 pp. 38-42. https://doi.org/10.1109/IWSTM.2001.933822

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AU - Doong, K. Y.Y.

AU - Ting, J. K.

AU - Hsieh, S.

AU - Lin, S. C.

AU - Shen, B.

AU - Guo, J. C.

AU - Young, K. L.

AU - Chen, I. C.

AU - Sun, J. Y.C.

AU - Wang, J. K.

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AB - The design rules are categorized into two parts: the primitive and the affiliate ones, to excogitate the variance and invariance among the different technology nodes. The scaling trend was characterized and the process control capabilities of design rules were reviewed. Based on the data of in-line methodology and process physical specification, a novel algorithm is enacted to generate the design rule of next generation. The design rule is disassembled into two parts: ones are the criteria of electrical specification, and the others are the variations induced by the process sequences. The variations are modeled as the statistical distributions of in-line datum set. Monte Carlo simulation is used to extract the variations of multiple variable process parameters. Then, the design rules can be derived from the criteria of electrical specification, and the summation of the variations of multiple variable process parameters.

KW - Design rule

KW - Electrical specifications

KW - Inline metrology

KW - Monte Carlo simulation

KW - Physical specifications

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Y2 - 10 June 2001 through 10 June 2001

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Scaling variance, invariance and prediction of design rule: From 0.25-μm to 0.10-μtm nodes in the era of foundry manufacturing

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