S-Curve Engineering for ON-State Performance Using Anti-Ferroelectric/Ferroelectric Stack Negative-Capacitance FinFET

Shih En Huang, Pin Su*, Chen-Ming Hu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

This work investigates the S-curve engineering by exploiting the anti-ferroelectric (AFE)/ferroelectric (FE) stack negative-capacitance FinFET (NC-FinFET) to improve both the subthreshold swing and ON-state current ( ION ). The capacitance matching and ON-state performance are evaluated using a short-channel AFE/FE stack NC-FinFET model. Our study indicates that the AFE/FE gate-stack can theoretically achieve surprising improvements to the OFF-state current ( IOFF ) and ION relative to International Roadmap for Devices and Systems (IRDS) projections. There is a significant long-term advantage to integrated circuit (IC) power consumption and speed if materials with certain AFE and FE characteristics can be developed and introduced into IC manufacturing.

Original languageEnglish
Article number9502416
Pages (from-to)4787-4792
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume68
Issue number9
DOIs
StatePublished - Sep 2021

Keywords

  • Anti-ferroelectric (AFE)
  • FinFET
  • metal-ferroelectric-insulator-semiconductor (MFIS)-type negative-capacitance field-effect transistor (NCFET)

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