Robust ultrathin oxynitride dielectrics by NH₃ nitridation and N₂O RTA treatment

Keyphrases

• Ultrathin 100%
• Dielectric 100%
• Oxynitride 100%
• Nitridation 100%
• RTA Treatment 100%
• Electrical Properties 50%
• Trap Generation 50%
• Effective Dielectric Constant 50%
• Angstrom 50%
• Bulk Trap Density 50%
• Generation Rate 50%
• High Endurance 50%
• N2O Annealing 50%

Material Science

• Nitriding 100%
• Oxynitride 100%
• Dielectric Material 100%
• Density 50%
• Film 50%
• Annealing 50%
• Permittivity 50%