Reversible transition of resistive switching induced by oxygen-vacancy and metal filaments in HfO2

Wun Cheng Luo, Tuo-Hung Hou*, Kuan Liang Lin, Yao Jen Lee, Tan Fu Lei

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    22 Scopus citations

    Abstract

    In contrast to the irreversible transition of resistive switching induced by oxygen-vacancy filaments (VF) and metal filaments (MF) reported in the literature, this study reports coexistence and completely reversible transition of VF- and MF-induced resistive switching in a Ni/HfO2/SiO x/p+-Si device with three distinct and stable resistance states. In a dual filament model proposed, VF and MF may coexist at the same percolation path, and the formation and rupture proceed in a two-step fashion by choosing appropriate SET/RESET conditions. Exploiting the dependence of different filament compositions on resistive switching may enable new design space for future multi-level-cell resistive-switching memory.

    Original languageEnglish
    Pages (from-to)167-170
    Number of pages4
    JournalSolid-State Electronics
    Volume89
    DOIs
    StatePublished - Nov 2013

    Keywords

    • Filament
    • Multi-level-cell
    • RRAM
    • Resistive switching

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