Reproducible formation of nanoscale-gap electrodes for single-molecule measurements by combination of FIB deposition and tunneling current detection

K. Shigeto; M. Kawamura; A. Yu. Kasumov; K. Tsukagoshi; K. Kono; Y. Aoyagi

doi:10.1016/j.mee.2006.01.166

Reproducible formation of nanoscale-gap electrodes for single-molecule measurements by combination of FIB deposition and tunneling current detection

K. Shigeto^*, M. Kawamura, A. Yu. Kasumov, K. Tsukagoshi, K. Kono, Y. Aoyagi

^*Corresponding author for this work

International College of Semiconductor Technology

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We have reproducibly fabricated suspended tungsten electrodes with a gap of less than 2 ran on a suspended silicon nitride membrane with a slit. Our fabrication technique is based on the local deposition of tungsten by a focused ion beam. The length of the nanogap between the electrodes was controlled by detecting a tunneling current during the growth of the tungsten electrodes from both sides of the slit. The gap length can reach about 1 nm, which corresponds to the size of a single molecule such as a fullerene. (c) 2006 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1471-1473
Number of pages	3
Journal	Microelectronic Engineering
Volume	83
Issue number	4-9
DOIs	https://doi.org/10.1016/j.mee.2006.01.166
State	Published - Sep 2006
Event	31st International Conference on Micro- and Nano-Engineering - Vienna, Austria Duration: 19 Sep 2005 → 22 Sep 2005

Keywords

nanoelectrode
focused ion beam
single molecule
tunneling current

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10.1016/j.mee.2006.01.166

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title = "Reproducible formation of nanoscale-gap electrodes for single-molecule measurements by combination of FIB deposition and tunneling current detection",

abstract = "We have reproducibly fabricated suspended tungsten electrodes with a gap of less than 2 ran on a suspended silicon nitride membrane with a slit. Our fabrication technique is based on the local deposition of tungsten by a focused ion beam. The length of the nanogap between the electrodes was controlled by detecting a tunneling current during the growth of the tungsten electrodes from both sides of the slit. The gap length can reach about 1 nm, which corresponds to the size of a single molecule such as a fullerene. (c) 2006 Elsevier B.V. All rights reserved.",

keywords = "nanoelectrode, focused ion beam, single molecule, tunneling current",

author = "K. Shigeto and M. Kawamura and Kasumov, {A. Yu.} and K. Tsukagoshi and K. Kono and Y. Aoyagi",

year = "2006",

month = sep,

doi = "10.1016/j.mee.2006.01.166",

language = "English",

volume = "83",

pages = "1471--1473",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "4-9",

note = "31st International Conference on Micro- and Nano-Engineering ; Conference date: 19-09-2005 Through 22-09-2005",

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TY - JOUR

T1 - Reproducible formation of nanoscale-gap electrodes for single-molecule measurements by combination of FIB deposition and tunneling current detection

AU - Shigeto, K.

AU - Kawamura, M.

AU - Kasumov, A. Yu.

AU - Tsukagoshi, K.

AU - Kono, K.

AU - Aoyagi, Y.

PY - 2006/9

Y1 - 2006/9

N2 - We have reproducibly fabricated suspended tungsten electrodes with a gap of less than 2 ran on a suspended silicon nitride membrane with a slit. Our fabrication technique is based on the local deposition of tungsten by a focused ion beam. The length of the nanogap between the electrodes was controlled by detecting a tunneling current during the growth of the tungsten electrodes from both sides of the slit. The gap length can reach about 1 nm, which corresponds to the size of a single molecule such as a fullerene. (c) 2006 Elsevier B.V. All rights reserved.

AB - We have reproducibly fabricated suspended tungsten electrodes with a gap of less than 2 ran on a suspended silicon nitride membrane with a slit. Our fabrication technique is based on the local deposition of tungsten by a focused ion beam. The length of the nanogap between the electrodes was controlled by detecting a tunneling current during the growth of the tungsten electrodes from both sides of the slit. The gap length can reach about 1 nm, which corresponds to the size of a single molecule such as a fullerene. (c) 2006 Elsevier B.V. All rights reserved.

KW - nanoelectrode

KW - focused ion beam

KW - single molecule

KW - tunneling current

U2 - 10.1016/j.mee.2006.01.166

DO - 10.1016/j.mee.2006.01.166

M3 - Article

SN - 0167-9317

VL - 83

SP - 1471

EP - 1473

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 4-9

T2 - 31st International Conference on Micro- and Nano-Engineering

Y2 - 19 September 2005 through 22 September 2005

ER -

Reproducible formation of nanoscale-gap electrodes for single-molecule measurements by combination of FIB deposition and tunneling current detection

Abstract

Keywords

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