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Reliability of Atmosphere Pressure-Plasma Enhanced Chemical Vapor Deposition Deposited Indium Gallium Zinc Oxide Resistive Random Access Memory Device with Microwave Annealing

  • Chien-Hung Wu*
  • , Song-Nian Kuo
  • , Kow-Ming Chang
  • , Yi-Ming Chen
  • , Yu-Xin Zhang
  • , Ni Xu
  • , Wu-Yang Liu
  • , Albert Chin
  • *Corresponding author for this work

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