Reliability enhancement of high-mobility amorphous indium-tungsten oxide thin film transistor

Po-Tsun Liu, Chih Hsiang Chang, Chih Jui Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

In this work, a high-mobility amorphous In-W-O thin transistor (a-IWO TFT) is studied for flat panel displays applications. The effects of oxygen content on the electrical performance and reliability of a-IWO TFTs are mainly investigated by modulating oxygen partial pressure during IWO channel deposition. Experimental results show the high oxygen partial pressure will degrade the electrical stability and cause a large threshold voltage shift (ΔVT) in the a-IWO TFT device. To elucidate the origin of electrical instabilities, the interface trap densities, Dit, at the interface between gate insulator and IWO layer as well as bulk trap density, Nt, in the bulk of IWO film were extracted for comparisons. It shows that the interface states are increased as increasing oxygen partial pressures. The enhanced trapping of electron due to the increased interface states is considered to lead to large ΔVT in the TFT with increasing oxygen partial pressures.

Original languageEnglish
Title of host publication2015 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT 2015
EditorsY. Kuo
PublisherElectrochemical Society Inc.
Pages9-16
Number of pages8
Edition1
ISBN (Electronic)9781607685395
DOIs
StatePublished - 1 Jan 2015
Event2015 5th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT 2015 - Lake Tahoe, United States
Duration: 14 Jun 201518 Jun 2015

Publication series

NameECS Transactions
Number1
Volume67
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

Conference2015 5th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT 2015
Country/TerritoryUnited States
CityLake Tahoe
Period14/06/1518/06/15

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