Recess channel structure for reducing source/drain series resistance in ultra-thin SOI MOSFET

Mansun Chan*, Fariborz Assaderaghi, Stephen A. Parke, Selina S. Yuen, Chen-Ming Hu, Ping K. Ko

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

12 Scopus citations

Fingerprint

Dive into the research topics of 'Recess channel structure for reducing source/drain series resistance in ultra-thin SOI MOSFET'. Together they form a unique fingerprint.

Engineering & Materials Science