Rational Design on Wrinkle-Less Transfer of Transition Metal Dichalcogenide Monolayer by Adjustable Wettability-Assisted Transfer Method

Ying Chun Shen, Yu Ting Wu, Ling Lee, Jyun Hong Chen, Sumayah Shakil Wani, Tzu Yi Yang, Chih Wei Luo, Ming Deng Siao, Yi Jen Yu, Po Wen Chiu, Yu Lun Chueh*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Abstract

Transfer-induced wrinkles are universal issues when transferring transition metal dichalcogenide (TMDC) monolayer from an as-grown substrate to a target substrate. The undesired transfer-induced wrinkles can mainly be attributed to wettability, which refers to the ability of a liquid to come in contact with a solid surface. Herein, an adjustable wettability-assisted transfer (AWAT) method with different mixtures of transfer media to reduce the density of wrinkles is developed. By manipulating the wettability of the transfer medium with different ratios of alcohol and de-ionized (DI) water, the TMDC monolayer is smoothly attached to the target substrate, thus achieving a wrinkle-less transferred TMDC monolayer. With this method, the density of wrinkles can be decreased by ≈15–20% compared with the conventional transfer method by pure DI water. The transferred MoS2 monolayer with the AWAT method can achieve enhanced carrier mobility from ≈20 to ≈35 cm2 V−1 s−1 in average, which is 30 times larger than that transferred by pure DI water. The AWAT method applied to a WS2 monolayer onto a SiO2/p+-Si substrate and a MoS2 monolayer onto a HfO2/p+-Si substrate are demonstrated, which is beneficial in research and applications involving the transfer of TMDC monolayer.

Original languageEnglish
Article number2104978
Number of pages12
JournalAdvanced Functional Materials
Volume31
Issue number45
DOIs
StatePublished - Nov 2021

Keywords

  • transition metal dichalcogenides materials
  • wet transfer
  • wettability
  • wrinkleless transfer

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