TY - GEN
T1 - Rapid pdms-glass bonding using argon plasma jet towards automatic chip fabrication
AU - Chuang, Shih Chi
AU - Tsai, Chia Hung Dylan
N1 - Publisher Copyright:
© 2019 CBMS-0001.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2019
Y1 - 2019
N2 - This paper reports a rapid PDMS-Glass bonding method with an atmospheric pressure plasma jet (APPJ). The jet is mounted on a 3D plotter for applying plasma along a specified path on a target PDMS chip and slide glass. After the treatment, the chip and glass are stacking together, and strong covalent bonding between them would be formed within 2 seconds. Experimental results show a very interesting result that bonding strength is not always improved with the increases of plasma dose.
AB - This paper reports a rapid PDMS-Glass bonding method with an atmospheric pressure plasma jet (APPJ). The jet is mounted on a 3D plotter for applying plasma along a specified path on a target PDMS chip and slide glass. After the treatment, the chip and glass are stacking together, and strong covalent bonding between them would be formed within 2 seconds. Experimental results show a very interesting result that bonding strength is not always improved with the increases of plasma dose.
KW - Atmospheric pressure plasma jet
KW - Evaluation of bonding strength
KW - Plasma bonding
UR - http://www.scopus.com/inward/record.url?scp=85094976989&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85094976989
T3 - 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019
SP - 1080
EP - 1081
BT - 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019
PB - Chemical and Biological Microsystems Society
T2 - 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019
Y2 - 27 October 2019 through 31 October 2019
ER -