Prioritisation on 5S activities for a semiconductor wafer fabrication: An empirical study

Yung-Chia Chang*, Chuan Yung Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations


Purpose: Semiconductor wafer fabrication (FAB) is recognized as one of the most complex manufacturing systems. A newly built FAB has to pass various audits from its customer before the customer's wafers are initially produced. 5S audit is one of them. In order to comply with customer (auditor) expectations toward 5S practice, this paper assists wafer fabrication managers in allocating the limited resources to places that are valued most by their customer. The paper aims to discuss these issues. Design/methodology/approach: This paper applied Yang's refined Kano model to Ho's 5S checklist to prioritise these checkpoints for a FAB. An empirical study based on Ho's 5S checklist from experienced internal auditors (respondents) to prioritise 5S activities was explored to justify its feasibility for a FAB and importance-satisfaction for customer. Findings: An empirical study in a case FAB demonstrated how the refined model prioritised 5S activities based on Ho's 5S checklist. The result of this study further showed that quality attributes possess different identities, which could offer management more framable scopes to implement 5S practice and sustain 5S scene management. Research limitations/implications: Since this empirical study was focused on a 300-mm wafer fabrication company, the results and findings may not generally explain other wafer-size fabrications. Practical implications: This study was applied to a real-world case of a newly built 300-mm semiconductor fabrication in Taiwan. It is a straightforward bridge to link a methodology in a practical manner to disseminate information to both researchers and practitioners. Originality/value: From the adoption of the refined Kano model, specific required check points for 5S practice are transformed from subjective, conceptual and linguistic practice to be identified, quantified and prioritised for semiconductor wafer fabrication under resources constraints to cater customer's 5S expectations and to generate more attention in building-up a much more robust scene management. This paper provided a systemic way to prioritise 5S activities for a semiconductor wafer fabrication.

Original languageEnglish
Pages (from-to)380-394
Number of pages15
JournalInternational Journal of Quality and Reliability Management
Issue number4
StatePublished - 1 Jan 2014


  • 5S practice
  • Attractive quality
  • Importance-satisfaction model
  • Refined Kano model
  • Semiconductor fabrication


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