Preparation of silicon nanowire field-effect transistor for chemical and biosensing applications

Jennifer Yun Shin Wu, Chih Heng Lin, Mei Huei Feng, Chien Hung Chen, Ping Chia Su, Po Wen Yang, Jian Ming Zheng, Chang Wei Fu, Yuh-Shyong Yang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we describe the preparation of polycrystalline silicon nanowire field-effect transistors (pSNWFETs) that serve as biosensing devices for biomarker detection. A protocol for chemical and biomolecular sensing by using pSNWFETs is presented. The pSNWFET device was demonstrated to be a promising transducer for real-time, label-free, and ultra-high-sensitivity biosensing applications. The source/drain channel conductivity of a pSNWFET is sensitive to changes in the environment around its silicon nanowire (SNW) surface. Thus, by immobilizing probes on the SNW surface, the pSNWFET can be used to detect various biotargets ranging from small molecules (dopamine) to macromolecules (DNA and proteins). Immobilizing a bioprobe on the SNW surface, which is a multistep procedure, is vital for determining the specificity of the biosensor. It is essential that every step of the immobilization procedure is correctly performed. We verified surface modifications by directly observing the shift in the electric properties of the pSNWFET following each modification step. Additionally, X-ray photoelectron spectroscopy was used to examine the surface composition following each modification. Finally, we demonstrated DNA sensing on the pSNWFET. This protocol provides step-by-step procedures for verifying bioprobe immobilization and subsequent DNA biosensing application.

Original languageEnglish
Article numbere53660
JournalJournal of Visualized Experiments
Issue number110
StatePublished - 1 Apr 2016


  • Bioengineering
  • Biosensing
  • Charge-charge interaction
  • Issue 110
  • Label-free
  • Nanowire field-effect transistor
  • Polysilicon
  • Real-time detection
  • Surface modification


Dive into the research topics of 'Preparation of silicon nanowire field-effect transistor for chemical and biosensing applications'. Together they form a unique fingerprint.

Cite this