Preparation of nano-scale patterns on the silicon oxide surface by dip-pen nanolithography

Jeng-Tzong Sheu; C. H. Wu; H. H. Liu; Tien-Sheng Chao

doi:10.1109/NANO.2005.1500862

Preparation of nano-scale patterns on the silicon oxide surface by dip-pen nanolithography

Jeng-Tzong Sheu^*, C. H. Wu, H. H. Liu, Tien-Sheng Chao

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Dip-pen nanolithography (DPN), which uses an "inked" AFM tip to deposit organic molecules through a water meniscus onto an underlying substrate under ambient conditions, has been used to create N-(2-aminoethyl)-3-amino- propyl-trimethoxysilane (AEAPTMS) nano patterns as linkers for anchoring gold nanoparticles on the surface of SiO₂. In this study, conditions of DPN for organic patterns, AEAPTMS, with sub-100 nm dimensions are investigated. Moreover, gold nanoparticles with citrate-negativey-charged surface were deposited selectively on top of DPN orgainc patterns. Lateral force microscope (LFM) was utilized to differentiate different surface between oxidized semi-conductor surfaces and patterned areas with monolayer of AEAPTMS. Line-width as small as 60 nm has been successfully achieved by this method.

Original language	English
Title of host publication	2005 5th IEEE Conference on Nanotechnology
Pages	895-898
Number of pages	4
DOIs	https://doi.org/10.1109/NANO.2005.1500862
State	Published - 1 Dec 2005
Event	2005 5th IEEE Conference on Nanotechnology - Nagoya, Japan Duration: 11 Jul 2005 → 15 Jul 2005

Publication series

Name	2005 5th IEEE Conference on Nanotechnology
Volume	2

Conference

Conference	2005 5th IEEE Conference on Nanotechnology
Country/Territory	Japan
City	Nagoya
Period	11/07/05 → 15/07/05

Keywords

AFM tip
Dip-pen nanolithography (DPN)
Lateral force microscopy (LFM)
N-(2-aminoethyl)-3-amino propyl-tri-meth-oxysilane (AEAPT-MS)

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10.1109/NANO.2005.1500862

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@inproceedings{09b0befe1c7445d89efefa23de5de139,

title = "Preparation of nano-scale patterns on the silicon oxide surface by dip-pen nanolithography",

abstract = "Dip-pen nanolithography (DPN), which uses an {"}inked{"} AFM tip to deposit organic molecules through a water meniscus onto an underlying substrate under ambient conditions, has been used to create N-(2-aminoethyl)-3-amino- propyl-trimethoxysilane (AEAPTMS) nano patterns as linkers for anchoring gold nanoparticles on the surface of SiO2. In this study, conditions of DPN for organic patterns, AEAPTMS, with sub-100 nm dimensions are investigated. Moreover, gold nanoparticles with citrate-negativey-charged surface were deposited selectively on top of DPN orgainc patterns. Lateral force microscope (LFM) was utilized to differentiate different surface between oxidized semi-conductor surfaces and patterned areas with monolayer of AEAPTMS. Line-width as small as 60 nm has been successfully achieved by this method.",

keywords = "AFM tip, Dip-pen nanolithography (DPN), Lateral force microscopy (LFM), N-(2-aminoethyl)-3-amino propyl-tri-meth-oxysilane (AEAPT-MS)",

author = "Jeng-Tzong Sheu and Wu, {C. H.} and Liu, {H. H.} and Tien-Sheng Chao",

year = "2005",

month = dec,

day = "1",

doi = "10.1109/NANO.2005.1500862",

language = "English",

isbn = "0780391993",

series = "2005 5th IEEE Conference on Nanotechnology",

pages = "895--898",

booktitle = "2005 5th IEEE Conference on Nanotechnology",

note = "2005 5th IEEE Conference on Nanotechnology ; Conference date: 11-07-2005 Through 15-07-2005",

}

TY - GEN

T1 - Preparation of nano-scale patterns on the silicon oxide surface by dip-pen nanolithography

AU - Sheu, Jeng-Tzong

AU - Wu, C. H.

AU - Liu, H. H.

AU - Chao, Tien-Sheng

PY - 2005/12/1

Y1 - 2005/12/1

N2 - Dip-pen nanolithography (DPN), which uses an "inked" AFM tip to deposit organic molecules through a water meniscus onto an underlying substrate under ambient conditions, has been used to create N-(2-aminoethyl)-3-amino- propyl-trimethoxysilane (AEAPTMS) nano patterns as linkers for anchoring gold nanoparticles on the surface of SiO2. In this study, conditions of DPN for organic patterns, AEAPTMS, with sub-100 nm dimensions are investigated. Moreover, gold nanoparticles with citrate-negativey-charged surface were deposited selectively on top of DPN orgainc patterns. Lateral force microscope (LFM) was utilized to differentiate different surface between oxidized semi-conductor surfaces and patterned areas with monolayer of AEAPTMS. Line-width as small as 60 nm has been successfully achieved by this method.

AB - Dip-pen nanolithography (DPN), which uses an "inked" AFM tip to deposit organic molecules through a water meniscus onto an underlying substrate under ambient conditions, has been used to create N-(2-aminoethyl)-3-amino- propyl-trimethoxysilane (AEAPTMS) nano patterns as linkers for anchoring gold nanoparticles on the surface of SiO2. In this study, conditions of DPN for organic patterns, AEAPTMS, with sub-100 nm dimensions are investigated. Moreover, gold nanoparticles with citrate-negativey-charged surface were deposited selectively on top of DPN orgainc patterns. Lateral force microscope (LFM) was utilized to differentiate different surface between oxidized semi-conductor surfaces and patterned areas with monolayer of AEAPTMS. Line-width as small as 60 nm has been successfully achieved by this method.

KW - AFM tip

KW - Dip-pen nanolithography (DPN)

KW - Lateral force microscopy (LFM)

KW - N-(2-aminoethyl)-3-amino propyl-tri-meth-oxysilane (AEAPT-MS)

UR - http://www.scopus.com/inward/record.url?scp=33746911181&partnerID=8YFLogxK

U2 - 10.1109/NANO.2005.1500862

DO - 10.1109/NANO.2005.1500862

M3 - Conference contribution

AN - SCOPUS:33746911181

SN - 0780391993

SN - 9780780391994

T3 - 2005 5th IEEE Conference on Nanotechnology

SP - 895

EP - 898

BT - 2005 5th IEEE Conference on Nanotechnology

T2 - 2005 5th IEEE Conference on Nanotechnology

Y2 - 11 July 2005 through 15 July 2005

ER -

Preparation of nano-scale patterns on the silicon oxide surface by dip-pen nanolithography

Abstract

Publication series

Conference

Keywords

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