@inproceedings{a487ebd326ad4ec6859af6181575f40e,
title = "Power efficient V-shape electro-thermal actuator using constrained SU-8",
abstract = "This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-μm long, 56-μm wide, 60-μm high, 15° bent) demonstrates a large in-plane motion (10 μm) at a 1.75-V driving voltage, consuming low power (16 mW) and operating at a relatively low temperature (125 °C). It is estimated to produce a blocked apex force of 100 mN at 1.75 V.",
keywords = "Micro-actuators, Polymeric composite, SU-8, Thermal actuator",
author = "Lau, {Gih Keong} and DuC., {T. Chu} and Goosen, {J. F.L.} and Sarro, {P. M.} and {Van Keulen}, F.",
year = "2007",
doi = "10.1109/SENSOR.2007.4300125",
language = "English",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "287--290",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}