Post-Polysilicon Gate-Process-Induced Degradation on Thin Gate Oxide

Chao Sung Lai, Tan Fu Lei, Chung Len Lee, Tien-Sheng Chao

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Post-Polysilicon Gate-Process-Induced Degradation on Thin Gate Oxide'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds