Porous materials with ultra-low optical constants for integrated optical devices applications

H. L. Chen; C. P. Chang; C. C. Cheng; C. I. Hsieh; W. S. Wang; Po-Tsun Liu

doi:10.1109/IMNC.2004.245783

Porous materials with ultra-low optical constants for integrated optical devices applications

H. L. Chen^*, C. P. Chang, C. C. Cheng, C. I. Hsieh, W. S. Wang, Po-Tsun Liu

^*Corresponding author for this work

Department of Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The optical characteristics such as, ultra-low optical constants, for porous MSQ films, and epoxy based SU-8 resist were investigated for integrated optical devices applications. The refractive index of porous MSQ is found to decrease to around 1.320 as the hydration time exceed 24 hours. The measure refractive index is about 1.163 at 1550 nm wavelength. It is found that due to low refractive index and low absorption in the large spectra regimes, porous MSQ films would be cladding materials.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2004
Publisher	The Japan Society of Applied Physics
Pages	180-181
Number of pages	2
ISBN (Print)	4990247205, 9784990247201
DOIs	https://doi.org/10.1109/IMNC.2004.245783
State	Published - 26 Oct 2004
Event	2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan Duration: 26 Oct 2004 → 29 Oct 2004

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference	2004 International Microprocesses and Nanotechnology Conference
Country/Territory	Japan
City	Osaka
Period	26/10/04 → 29/10/04

Access to Document

10.1109/IMNC.2004.245783

Cite this

Chen, H. L., Chang, C. P., Cheng, C. C., Hsieh, C. I., Wang, W. S., & Liu, P.-T. (2004). Porous materials with ultra-low optical constants for integrated optical devices applications. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 180-181). Article 1459533 (Digest of Papers - Microprocesses and Nanotechnology 2004). The Japan Society of Applied Physics. https://doi.org/10.1109/IMNC.2004.245783

@inproceedings{4b56b5d288c6480185f3d6bc5c445e03,

title = "Porous materials with ultra-low optical constants for integrated optical devices applications",

abstract = "The optical characteristics such as, ultra-low optical constants, for porous MSQ films, and epoxy based SU-8 resist were investigated for integrated optical devices applications. The refractive index of porous MSQ is found to decrease to around 1.320 as the hydration time exceed 24 hours. The measure refractive index is about 1.163 at 1550 nm wavelength. It is found that due to low refractive index and low absorption in the large spectra regimes, porous MSQ films would be cladding materials.",

author = "Chen, {H. L.} and Chang, {C. P.} and Cheng, {C. C.} and Hsieh, {C. I.} and Wang, {W. S.} and Po-Tsun Liu",

year = "2004",

month = oct,

day = "26",

doi = "10.1109/IMNC.2004.245783",

language = "English",

isbn = "4990247205",

series = "Digest of Papers - Microprocesses and Nanotechnology 2004",

publisher = "The Japan Society of Applied Physics",

pages = "180--181",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2004",

note = "2004 International Microprocesses and Nanotechnology Conference ; Conference date: 26-10-2004 Through 29-10-2004",

}

Chen, HL, Chang, CP, Cheng, CC, Hsieh, CI, Wang, WS & Liu, P-T 2004, Porous materials with ultra-low optical constants for integrated optical devices applications. in Digest of Papers - Microprocesses and Nanotechnology 2004., 1459533, Digest of Papers - Microprocesses and Nanotechnology 2004, The Japan Society of Applied Physics, pp. 180-181, 2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, 26/10/04. https://doi.org/10.1109/IMNC.2004.245783

Porous materials with ultra-low optical constants for integrated optical devices applications. / Chen, H. L.; Chang, C. P.; Cheng, C. C. et al.
Digest of Papers - Microprocesses and Nanotechnology 2004. The Japan Society of Applied Physics, 2004. p. 180-181 1459533 (Digest of Papers - Microprocesses and Nanotechnology 2004).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Wang, W. S.

AU - Liu, Po-Tsun

PY - 2004/10/26

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AB - The optical characteristics such as, ultra-low optical constants, for porous MSQ films, and epoxy based SU-8 resist were investigated for integrated optical devices applications. The refractive index of porous MSQ is found to decrease to around 1.320 as the hydration time exceed 24 hours. The measure refractive index is about 1.163 at 1550 nm wavelength. It is found that due to low refractive index and low absorption in the large spectra regimes, porous MSQ films would be cladding materials.

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T3 - Digest of Papers - Microprocesses and Nanotechnology 2004

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BT - Digest of Papers - Microprocesses and Nanotechnology 2004

PB - The Japan Society of Applied Physics

T2 - 2004 International Microprocesses and Nanotechnology Conference

Y2 - 26 October 2004 through 29 October 2004

ER -

Porous materials with ultra-low optical constants for integrated optical devices applications

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