Polymer TSV fabrication scheme with its electrical and reliability test vehicle

Keyphrases

• Daisy Chain 66%
• Electrical Measurements 33%
• Electrical Performance 33%
• Electrical Reliability 33%
• Electrical Test 100%
• Fabrication Methods 33%
• Humidity Testing 33%
• Kelvin Structure 33%
• Liner 33%
• Manufacturability 33%
• Polymeric Liners 33%
• Process Scheme 33%
• Reliability Test 100%
• Thermal Cycling Test 33%
• TSV Fabrication 100%
• TSV Technology 33%
• Void-free 33%

Engineering

• Electrical Measurement 50%
• Electrical Performance 50%
• Fabrication Approach 50%
• Humidity Test 50%
• Manufacturability 50%
• Reliability Analysis 100%
• Test Vehicle 100%
• Three Dimensional Integrated Circuits 50%

Material Science

• Lining 100%
• Thermal Cycling 50%