Photonic crystal horizontally slotted nanobeam cavity for silicon-based nanolasers

Tsan Wen Lu; Pin Tso Lin; Po Tsung Lee

doi:10.1364/OL.37.000569

Photonic crystal horizontally slotted nanobeam cavity for silicon-based nanolasers

Tsan Wen Lu, Pin Tso Lin, Po Tsung Lee^*

^*Corresponding author for this work

Department of Photonics

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Abstract

We theoretically propose and investigate a TM-polarized one-dimensional photonic crystal nanocavity with a horizontal SiO₂ slot on a suspended silicon nanobeam via the three-dimensional finite-element method. The ultrahigh quality factor and ultrasmall effective mode volume of 1.5 × 10⁷ and 0.176 half-wavelength cubic of the horizontally SiO ₂-slotted nanocavity show strong possibilities for realizing an erbium-doped SiO₂ nanolaser. This horizontal SiO₂ slot structure can be precisely formed via the sputtering process and further transformed into an air slot via selective wet etching for optical index and biomolecule sensing.

Original language	English
Pages (from-to)	569-571
Number of pages	3
Journal	Optics Letters
Volume	37
Issue number	4
DOIs	https://doi.org/10.1364/OL.37.000569
State	Published - 15 Feb 2012

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abstract = "We theoretically propose and investigate a TM-polarized one-dimensional photonic crystal nanocavity with a horizontal SiO2 slot on a suspended silicon nanobeam via the three-dimensional finite-element method. The ultrahigh quality factor and ultrasmall effective mode volume of 1.5 × 107 and 0.176 half-wavelength cubic of the horizontally SiO 2-slotted nanocavity show strong possibilities for realizing an erbium-doped SiO2 nanolaser. This horizontal SiO2 slot structure can be precisely formed via the sputtering process and further transformed into an air slot via selective wet etching for optical index and biomolecule sensing.",

author = "Lu, {Tsan Wen} and Lin, {Pin Tso} and Lee, {Po Tsung}",

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AU - Lu, Tsan Wen

AU - Lin, Pin Tso

AU - Lee, Po Tsung

PY - 2012/2/15

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N2 - We theoretically propose and investigate a TM-polarized one-dimensional photonic crystal nanocavity with a horizontal SiO2 slot on a suspended silicon nanobeam via the three-dimensional finite-element method. The ultrahigh quality factor and ultrasmall effective mode volume of 1.5 × 107 and 0.176 half-wavelength cubic of the horizontally SiO 2-slotted nanocavity show strong possibilities for realizing an erbium-doped SiO2 nanolaser. This horizontal SiO2 slot structure can be precisely formed via the sputtering process and further transformed into an air slot via selective wet etching for optical index and biomolecule sensing.

AB - We theoretically propose and investigate a TM-polarized one-dimensional photonic crystal nanocavity with a horizontal SiO2 slot on a suspended silicon nanobeam via the three-dimensional finite-element method. The ultrahigh quality factor and ultrasmall effective mode volume of 1.5 × 107 and 0.176 half-wavelength cubic of the horizontally SiO 2-slotted nanocavity show strong possibilities for realizing an erbium-doped SiO2 nanolaser. This horizontal SiO2 slot structure can be precisely formed via the sputtering process and further transformed into an air slot via selective wet etching for optical index and biomolecule sensing.

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Photonic crystal horizontally slotted nanobeam cavity for silicon-based nanolasers

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