Photocatalytic study for indium tantalum oxide thin film in visible light

Chuan Li*, Joe Jang Hsin Hsieh, Po Hui Hsueh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Indium tantalum oxide thin film was deposited by sputtering using three different designs: 5-7 and 10-14 nm alternative layers of Ta 2 O 5 and In 2 O 3 and co-sputtering of In 2 O 3 and Ta 2 O 5 . Then, as-deposited films were rapidly annealed at different temperatures to assess the thermal effects on microstructures and photocatalytic functions. Results from XRD and energy-dispersive x-ray spectrometer indicate that crystalline InTaO 4 emerges in 5-7 and 10-14 nm stacks of films but absent in the co-sputtered films. Since crystalline InTaO 4 is capable of photocatalysis under both ultraviolet and visible light, the authors particularly tested the annealed films in water to degrade methylene blue under visible light. The photo-induced degradation on methylene blue by 5-7 and 10-14 nm stacks can reach 45% after 6-h continuous exposure. Using UV-Visible-Near Infrared spectroscopy, the authors can estimate the optical bandgaps in these annealed films and from these estimations, a mechanism for the photocatalysis is discussed. This mechanism is similar to the other electron-hole separation and transfer across the heterogeneous junctions in semiconductors.

Original languageEnglish
Article number021515
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number2
StatePublished - 1 Mar 2019


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